Awan Coordinate Map
m14 4SA MA002450A( SN HM BSI ETCHBACK CLN CD AVIS(TILT)) -
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Magnification:
Pixel:512,512
Rotation:
22
CHK PRMT Formula Point Cnt Image Cnt Coord Fail Cnt
EDGE_B_BCD_OVL_X 4 4 0
EDGE_B_BCD_OVL_Y 4 4 0
EDGE_B_BCD_OVLX_STD 4 4 0
EDGE_B_BCD_OVLY_STD 4 4 0
EDGE_B_BCDX 4 4 0
EDGE_B_BCDY 4 4 0
EEDGE_B_TCD_OVL_X 4 4 0
EDGE_B_TCD_OVL_Y 4 4 0
EDGE_B_TCD_OVLX_STD 4 4 0
EDGE_B_TCD_OVLY_STD 4 4 0
LOT_ID WF_ID PRMT SITE_SEQ IMG_YN VALUE CHIPINDEX_X CHIPINDEX_Y CHIPX CHIPY
1 TSAJ156 11 EDGE_B-BCD_OVL_X 1 Y -2.51 -4000 -3000 5812808000 5216126000
2 TSAJ156 11 EDGE_B-BCD_OVL_X 2 Y -1.31 -2000 -4000 11574604000 5214078000
3 TSAJ156 11 EDGE_B-BCD_OVL_X 3 Y -0.06 2000 -4000 11464553000 5215317000
4 TSAJ156 11 EDGE_B-BCD_OVL_X 4 Y -0.29 4000 -3000 17225553000 5215317000
LOT_ID WF_ID SITE_SEQ EDGE_B_BCD_OVL_X EDGE_B_BCD_OVL_X
Chip Value Image Chip Value Image
1 TSAJ156 11 1 -4,-3 -2.51 Y -4,-3 -2.47 Y
2 TSAJ156 11 2 -2,-4 -1.31 Y -2,-4 -3.03 Y
3 TSAJ156 11 3 2,-4 -0.06 Y 2,-4 -2.74 Y
4 TSAJ156 11 3 4.-3 -0.29 Y 4.-3 -2.55 Y
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