Awan Coordinate Map
DF01 A13-000-013 [ETCH MASK CD]-
Page
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Magnification:
Pixel:512,512
Rotation:
| CHK | PARAMETER | Point Cnt | Image Cnt | Coord Fail Cnt |
|---|---|---|---|---|
|
|
Overlay_X | 4 | 4 | 0 |
|
|
Overlay_Y | 4 | 4 | 0 |
|
|
Field_X | 4 | 4 | 0 |
|
|
Field_Y | 4 | 4 | 0 |
|
|
Field_Index_X | 4 | 4 | 0 |
|
|
Field_Index_Y | 4 | 4 | 0 |
| LOT_ID | WF_ID | PARAMETER | IMG_YN | VALUE | Field_X | Field_Y | |
|---|---|---|---|---|---|---|---|
| 1 | JOB#1 | 11 | Overlay_X | Y | -2.51 | -4 | -3 |
| 2 | JOB#2 | 11 | Overlay_X | Y | -1.31 | -2 | -4 |
| 3 | JOB#3 | 11 | Overlay_X | Y | -0.06 | 2 | -4 |
| 4 | JOB#4 | 11 | Overlay_X | Y | -0.29 | 4 | -3 |
| LOT_ID | WF_ID | SITE_SEQ | EDGE_B_BCD_OVL_X | EDGE_B_BCD_OVL_X | |||||
|---|---|---|---|---|---|---|---|---|---|
| Chip | Value | Image | Chip | Value | Image | ||||
| 1 | TSAJ156 | 11 | 1 | -4,-3 | -2.51 | Y | -4,-3 | -2.47 | Y |
| 2 | TSAJ156 | 11 | 2 | -2,-4 | -1.31 | Y | -2,-4 | -3.03 | Y |
| 3 | TSAJ156 | 11 | 3 | 2,-4 | -0.06 | Y | 2,-4 | -2.74 | Y |
| 4 | TSAJ156 | 11 | 3 | 4.-3 | -0.29 | Y | 4.-3 | -2.55 | Y |
