Awan Statistic Report
Awan Static Report - Condition
| Fab Code |
Complete Time |
Job Cont | Image Count | |||||||
|---|---|---|---|---|---|---|---|---|---|---|
| Measure Count | Complete Count | Error Count | Incomplete Count | Point | Input | Complete | Delta | |||
| 1 | DF01 | 20251120 | 3 | 0 | 3 | 0 | 0 | 0 | 0 | 0 |
| 2 | DF01 | 20251121 | 10 | 10 | 0 | 0 | 1,530 | 270 | 90 | 1,440 |
| 3 | DF01 | 20251122 | 4 | 0 | 4 | 0 | 0 | 0 | 0 | 0 |
| 4 | DF01 | 20251123 | 9 | 9 | 0 | 0 | 1,377 | 243 | 81 | 1,296 |
| 5 | DF01 | 20251124 | 12 | 0 | 0 | 12 | 0 | 0 | 0 | 0 |
| 6 | DF01 | 20251125 | 4 | 4 | 0 | 0 | 11,532 | 11,532 | 5,766 | 5,766 |
| 7 | DF01 | 20251126 | 2 | 2 | 0 | 0 | 5,768 | 5,768 | 2,884 | 2,884 |
| 8 | DF01 | 20251127 | 4 | 4 | 0 | 0 | 11,536 | 11,536 | 5,710 | 5,826 |
| Fab Code | Lot Code | Recipe Name | Oper | Oper Desc |
|---|---|---|---|---|
| DF01 | MON | SEM_DL_HEALTH_INDEX_F16X_AWAN | * | - |
| DF01 | MON | SEM_DL_HEALTH_INDEX_F16X_AWAN | MON-01A-001 | CD1(PHOTO) |
| DF01 | MON | SEM_DL_HEALTH_INDEX_F16X_AWAN | * | - |
| DF01 | MON | SEM_DL_HEALTH_INDEX_F16X_AWAN | MON-01A-001 | CD1(PHOTO) |
| DF01 | LOTA | MULTI_RECIPE | * | - |
| DF01 | LOTA | CM0_OVL_Y_PROV3E_RND_R0 | P95-152-X7B | ETCH CLN CD Awan(C2) |
| DF01 | LOTA | ACTIVE_OVLY_PROV_P35_R1 | P95-152-X7B | ETCH CLN CD Awan(C) |
| DF01 | LOTA | M0C_OVLY_PROV_CMTP1_R0 | P95-152-X7B | ETCH CLN CD Awan(C5) |