Job History

Job History - Condition

Fab
Code
Lot
Code
Measure
Equip
MODEL Lot ID Wafe
ID
Oper Oper Desc Area
Code
Status Point
Count
Image
Count
Complete
Count
Delta
Count
Coord Fail
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Error
Code
Error Desc Image Receive Time Measure Time Job Update Time Data Collector Time Working
Time
Analyze Time Job Folder Recipe Awan Recipe Log Image File
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1 DF01 8CG AWAN CDSEM NTP_0001 5 * Analyzing 0 0 0 0 0 2025-12-10 10:11 2025-12-10 10:13 EQP_INSPECT00001_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R1
2 DF01 8SC AWAN HVSEM NTP_0002 3 A02-000-002 ETCH MASK CD PHOTO Analyzing 0 0 0 0 0 2025-12-10 10:11 2025-12-10 10:08 EQP_INSPECT00002_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R1
3 DF01 Z8TEE AWAN OCD INTP_0003 1 A03-000-003 ETCH MASK CD MI Complete 432 72 72 360 0 2025-12-10 10:07 2025-12-10 10:11 2025-12-10 10:11 2025-12-10 10:13 0:05:21 0:03:02 EQP_INSPECT00003_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R3
4 DF01 Z8TEE AWAN CDSEM INTP_0004 1 A04-000-004 ETCH MASK CD MI Complete 432 72 72 360 0 2025-12-10 10:07 2025-12-10 10:11 2025-12-10 10:11 2025-12-10 10:12 0:05:08 0:02:49 EQP_INSPECT00004_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R2
5 DF01 8SS AWAN OCD INTP_0005 12 A05-000-005 ETCH MASK CD IMP Complete 9 9 9 0 0 2025-12-10 10:07 2025-12-10 10:09 2025-12-10 10:09 2025-12-10 10:11 0:04:10 0:01:41 EQP_INSPECT00005_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R2
6 DF01 8CF AWAN OCD INTP_0006 11 A06-000-006 ETCH MASK CD ETCH Complete 117 40 20 97 0 2025-12-10 10:07 2025-12-10 10:09 2025-12-10 10:09 2025-12-10 10:10 0:03:49 0:02:22 EQP_INSPECT00006_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R2
7 DF01 8CG AWAN HVSEM INTP_0007 5 A07-000-007 ETCH MASK CD ETCH Complete 47 94 47 0 45 2025-12-10 10:07 2025-12-10 10:09 2025-12-10 10:09 2025-12-10 10:11 0:04:10 0:01:37 EQP_INSPECT00007_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R3
8 DF01 Z8TEE AWAN OCD INTP_0008 15 * ETCH MASK CD Error 0 0 0 0 0 AWAN_100 Parsing Error! 2025-12-10 10:07 2025-12-10 10:09 2025-12-10 10:09 2025-12-10 10:11 0:04:10 0:01:37 EQP_INSPECT00008_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R3
9 DF01 8CC AWAN HVSEM INTP_0009 13 * Analyzed 0 0 0 0 0 2025-12-10 10:03 2025-12-10 10:15 0:01:14 EQP_INSPECT00009_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R1
10 DF01 8CC AWAN OCD INTP_0010 12 A10-000-010 ETCH MASK CD ETCH Complete 32 64 32 0 32 2025-12-10 9:57 2025-12-10 10:09 2025-12-10 10:09 2025-12-10 10:10 0:13:07 0:01:08 EQP_INSPECT00010_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R2
11 DF01 8CG AWAN OCD INTP_0011 14 A11-000-011 ETCH MASK CD PHOTO Complete 210 210 60 150 180 2025-12-10 09:57 2025-12-10 10:04 2025-12-10 10:04 2025-12-10 10:07 0:09:38 0:06:54 EQP_INSPECT00011_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R1
12 DF01 Z8TEE AWAN CDSEM INTP_0012 2 A12-000-012 ETCH MASK CD MI Complete 432 72 72 360 0 2025-12-10 09:57 2025-12-10 10:01 2025-12-10 10:02 2025-12-10 10:03 0:06:10 0:04:11 EQP_INSPECT00012_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R1
13 DF01 8SC AWAN CDSEM INTP_0013 12 * Error 0 0 0 0 0 AWAN_125 DB Connect Error! 2025-12-10 09:57 2025-12-10 09:59 0:01:05 EQP_INSPECT00013_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R3
14 DF01 8CC AWAN HVSEM INTP_0014 12 A14-000-014 ETCH MASK CD ETCH Complete 187 34 8 179 0 2025-12-10 09:57 2025-12-10 09:59 2025-12-10 10:00 2025-12-10 10:00 0:03:43 0:02:13 EQP_INSPECT00014_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R2
15 DF01 Z8TEE AWAN OCD INTP_0015 2 A15-000-015 ETCH MASK CD MI Complete 108 18 18 90 0 2025-12-10 09:56 2025-12-10 09:59 2025-12-10 09:59 2025-12-10 10:00 0:03:36 0:02:13 EQP_INSPECT00015_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R1
16 DF01 Z8TEE AWAN HVSEM INTP_0016 2 A16-000-016 ETCH MASK CD MI Complete 108 18 18 90 0 2025-12-10 09:56 2025-12-10 09:59 2025-12-10 09:59 2025-12-10 10:00 0:03:39 0:02:16 EQP_INSPECT00016_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R1
17 DF01 8CF AWAN CDSEM INTP_0017 20 A17-000-017 ETCH MASK CD PHOTO Complete 29 29 29 0 0 2025-12-10 09:53 2025-12-10 09:56 2025-12-10 09:56 2025-12-10 09:57 0:03:48 0:02:21 EQP_INSPECT00017_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R3
18 DF01 8CC AWAN CDSEM INTP_0018 11 A18-000-018 ETCH MASK CD ETCH Complete 32 64 32 0 32 2025-12-10 09:51 2025-12-10 10:02 2025-12-10 10:02 2025-12-10 10:04 0:12:47 0:11:03 EQP_INSPECT00018_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R2
19 DF01 8CF AWAN OCD INTP_0019 19 A19-000-019 ETCH MASK CD PHOTO Complete 29 29 29 0 0 2025-12-10 09:48 2025-12-10 09:51 2025-12-10 09:51 2025-12-10 09:52 0:03:53 0:02:28 EQP_INSPECT00019_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R2
20 DF01 8CG AWAN OCD INTP_0020 12 A20-000-020 ETCH MASK CD ETCH Complete 178 40 20 158 0 2025-12-10 09:48 2025-12-10 09:50 2025-12-10 09:51 2025-12-10 09:52 0:04:05 0:02:17 EQP_INSPECT00020_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R3
21 DF01 8CG AWAN HVSEM INTP_0021 10 A21-000-021 ETCH MASK CD IMP Complete 9 9 9 0 0 2025-12-10 09:47 2025-12-10 09:50 2025-12-10 09:50 2025-12-10 09:52 0:04:42 0:01:55 EQP_INSPECT00021_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R3
22 DF01 Z8TEE AWAN CDSEM INTP_0022 4 A22-000-022 ETCH MASK CD MI Complete 324 54 54 270 0 2025-12-10 09:47 2025-12-10 09:51 2025-12-10 09:51 2025-12-10 09:53 0:05:13 0:03:05 EQP_INSPECT00022_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R1
23 DF01 Z8TEE AWAN CDSEM INTP_0023 1 A23-000-023 ETCH MASK CD MI Complete 432 72 72 360 0 2025-12-10 09:47 2025-12-10 09:52 2025-12-10 09:52 2025-12-10 09:54 0:06:27 0:04:06 EQP_INSPECT00023_AWAN CD_MONITOR_MASK INSPECT_MONITOR_R2
24 DF01 Z8TEE AWAN HVSEM INTP_0024 1 A24-000-024 ETCH MASK CD MI Complete 108 18 18 90 0 2025-12-10 09:46 2025-12-10 09:49 2025-12-10 09:50 2025-12-10 09:50 0:04:06 0:02:19 EQP_INSPECT00024_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R2
25 DF01 Z8TEE AWAN CDSEM INTP_0025 1 A25-000-025 ETCH MASK CD MI Complete 108 18 18 90 0 2025-12-10 09:46 2025-12-10 09:49 2025-12-10 09:49 2025-12-10 09:50 0:04:05 0:02:35 EQP_INSPECT00025_AWAN HV_MONITOR_MASK INSPECT_MONITOR_R1