Awan 이력조회
Awan 이력조회 - Condition
| Fab Code |
Lot Code |
Measure Equip |
MODEL | ALIAS_LOT _ID |
Lot ID | Wafe ID |
Oper | Oper Desc | Area Code |
Status | Point Count |
Image Count |
Complete Count |
Delta Count |
Coord Fail Count |
Error Code |
Error Desc | Collector Receive Time | Measure Time | EDB Update Time | DCOL Check Time | Working Time |
Analyze Time | Task Folder | CD Recipe | Awan Recipe | Re-Measure | Log | Image File Download |
Analyze Cancel |
Simulation Cancel |
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 1 | DF01 | 8CG | 4AWAN | AWAN | TAGAU76 | S4EFS9779 | 5 | * | Analyzing | 0 | 0 | 0 | 0 | 0 | 2025-12-10 10:11 | 2025-12-10 10:13 | PDS101_INTP061466_AWAN | AG_SNFDO_HV | DF01_7D_SNFDO_HV_YMKIM_20201217 | |||||||||||||
| 2 | DF01 | 8SC | 4AWAN | AWAN | TSAJ638 | TSAJ638RW | 3 | R20632X5A | BLC ETCH CLN CD AWAN(C) | PHOTO | Analyzing | 0 | 0 | 0 | 0 | 0 | 2025-12-10 10:11 | 2025-12-10 10:08 | TSAJ638RW_03_1210101154619_AWAN | 4SA_BLC_2E_COB_R1 | SA_BLCETCHCLN_VISIBLEINDEX_PY_R3_1 | |||||||||||
| 3 | DF01 | Z8TEE | 4AWAN | AWAN | N4TMM00 | N4TMM00440 | 1 | N4NMMAC000600A | MI DF01A ETCH CG6300 RMA | MI | Complete | 432 | 72 | 72 | 360 | 0 | 2025-12-10 10:07 | 2025-12-10 10:11 | 2025-12-10 10:11 | 2025-12-10 10:13 | 0:05:21 | 0:03:02 | DCD6102_INTP297413_AWAN | CD_MONITORING_HR_800V_X | DF01_BM_PREDICTION_WRM_800V_X_BD_R2 | |||||||
| 4 | DF01 | Z8TEE | 4AWAN | AWAN | N4TMM00 | N4TMM00440 | 1 | N4NMMAC000600A | MI DF01A ETCH CG6300 RMA | MI | Complete | 432 | 72 | 72 | 360 | 0 | 2025-12-10 10:07 | 2025-12-10 10:11 | 2025-12-10 10:11 | 2025-12-10 10:12 | 0:05:08 | 0:02:49 | ECD0503_INTP167708_AWAN | CD_MONITORING_HR_800V_X | DF01_BM_PREDICTION_WRM_800V_X_BD_R2 | |||||||
| 5 | DF01 | 8SS | 4AWAN | AWAN | TSSHE29 | TSSHE29 | 12 | MA002075A | PMOS SIGE EPI CLN CD | IMP | Complete | 9 | 9 | 9 | 0 | 0 | 2025-12-10 10:07 | 2025-12-10 10:09 | 2025-12-10 10:09 | 2025-12-10 10:11 | 0:04:10 | 0:01:41 | ECDA703_INTP207201_AWAN | SS_HKMGEPI | SS_PMOS_HKMGEPI_CG6300_R0 | |||||||
| 6 | DF01 | 8CF | 4AWAN | AWAN | TAKNW67 | TAKNW67 | 11 | T62121B0A | SNC2(CELL) OPEN ETCH CLN CD | ETCH | Complete | 117 | 40 | 20 | 97 | 0 | 2025-12-10 10:07 | 2025-12-10 10:09 | 2025-12-10 10:09 | 2025-12-10 10:10 | 0:03:49 | 0:02:22 | ECDB003_INTP207388_AWAN | AK_SC2M0_SCO | DF01_CP_AG_SCO_DISTANCE_for_ImagePair_JSL_V3 | |||||||
| 7 | DF01 | 8CG | 4AWAN | AWAN | TAGAS88 | S4EFS9835 | 5 | T70843E4A | SN FULL DIP OUT CD HV | ETCH | Complete | 47 | 94 | 47 | 0 | 45 | 2025-12-10 10:07 | 2025-12-10 10:09 | 2025-12-10 10:09 | 2025-12-10 10:11 | 0:04:10 | 0:01:37 | TDSZ01_INTP114636_AWAN | AG_SNFDO_HV | DF01_7D_SNFDO_HV_YMKIM_20201217 | |||||||
| 8 | DF01 | Z8TEE | 4AWAN | AWAN | N4TMM00 | N4TMM00445 | 15 | * | AWAN | Error | 0 | 0 | 0 | 0 | 0 | Con | There is no TEXT Directory! | 2025-12-10 10:07 | 2025-12-10 10:09 | 2025-12-10 10:09 | 2025-12-10 10:11 | 0:04:10 | 0:01:37 | TDSZ01_INTP114636_AWAN | AG_SNFDO_HV | DF01_7D_SNFDO_HV_YMKIM_20201217 | ||||||
| 9 | DF01 | 8CC | 4AWAN | AWAN | TACNC96 | TACNC96 | 13 | * | Analyzed | 0 | 0 | 0 | 0 | 0 | 2025-12-10 10:03 | 2025-12-10 10:15 | 0:01:14 | ECD0503_INTP167709_AWAN | AC_SNHMEB_SN_TILT_TP | DF01_CP_SNHMEB_SN_TILT_OVL_CDI | ||||||||||||
| 10 | DF01 | 8CC | 4AWAN | AWAN | TACNC96 | TACNC96 | 12 | T60911XCA | SN HM ETCHBACK CLN CD AWAN(TILT) | ETCH | Complete | 32 | 64 | 32 | 0 | 32 | 2025-12-10 9:57 | 2025-12-10 10:09 | 2025-12-10 10:09 | 2025-12-10 10:10 | 0:13:07 | 0:01:08 | ECD0503_INTP167709_AWAN | AC_SNHMEB_SN_TILT_TP | DF01_CP_SNHMEB_SN_TILT_OVL_CDI | |||||||
| 11 | DF01 | 8CG | 4AWAN | AWAN | TAGB407 | TAGB407L | 14 | T11102B0A | SNC NEGA DIP OUT CLN CD | PHOTO | Complete | 210 | 210 | 60 | 150 | 180 | 2025-12-10 09:57 | 2025-12-10 10:04 | 2025-12-10 10:04 | 2025-12-10 10:07 | 0:09:38 | 0:06:54 | 4PCD2102_20251210_093654_AWAN | AG_SNCDO_SDM | DF01_AC_SNCDO_SDM_YMKIM_230919 | |||||||
| 12 | DF01 | Z8TEE | 4AWAN | AWAN | N4TMM00 | N4TMM00441 | 2 | N4NMMAC000600A | MI DF01A ETCH CG6300 RMA | MI | Complete | 432 | 72 | 72 | 360 | 0 | 2025-12-10 09:57 | 2025-12-10 10:01 | 2025-12-10 10:02 | 2025-12-10 10:03 | 0:06:10 | 0:04:11 | ECD5902_INTP282684_AWAN | CD_MONITORING_HR_800V_Y | DF01_BM_PREDICTION_WRM_800V_Y_BD_R2 | |||||||
| 13 | DF01 | 8SC | 4AWAN | AWAN | TSAJ199 | TSAJ199 | 12 | * | Error | 0 | 0 | 0 | 0 | 0 | MSR | SITE_SEQ parsing Error! | 2025-12-10 09:57 | 2025-12-10 09:59 | 0:01:05 | 6MCD4601_20251210_092822_AWAN | SA_SC2M0W_SH | SA_SC2M0W_SH_OFFSET_VERITY_R0 | ||||||||||
| 14 | DF01 | 8CC | 4AWAN | AWAN | TACND85 | TACND85 | 12 | T62121B0A | SNC2(CELL) OPEN ETCH CLN CD | ETCH | Complete | 187 | 34 | 8 | 179 | 0 | 2025-12-10 09:57 | 2025-12-10 09:59 | 2025-12-10 10:00 | 2025-12-10 10:00 | 0:03:43 | 0:02:13 | ECDB003_INTP207387_AWAN | AC_SC2M0_SCO | DF01_CP_AG_SCO_DISTANCE_for_ImagePair_JSL_V3 | |||||||
| 15 | DF01 | Z8TEE | 4AWAN | AWAN | N4TMM00 | N4TMM00002 | 2 | N4NMMAC000600A | MI DF01A ETCH CG6300 RMA | MI | Complete | 108 | 18 | 18 | 90 | 0 | 2025-12-10 09:56 | 2025-12-10 09:59 | 2025-12-10 09:59 | 2025-12-10 10:00 | 0:03:36 | 0:02:13 | ECD0202_INTP148061_AWAN | CD_MONITORING_HR_800V_Y | DF01_BM_PREDICTION_WRM_800V_Y_BD_R2 | |||||||
| 16 | DF01 | Z8TEE | 4AWAN | AWAN | N4TMM00 | N4TMM00458 | 2 | N4NMMAC000600A | MI DF01A ETCH CG6300 RMA | MI | Complete | 108 | 18 | 18 | 90 | 0 | 2025-12-10 09:56 | 2025-12-10 09:59 | 2025-12-10 09:59 | 2025-12-10 10:00 | 0:03:39 | 0:02:16 | ECDD103_INTP149479_AWAN | CD_MONITORING_HR_800V_Y | DF01_BM_PREDICTION_WRM_800V_Y_BD_R2 | |||||||
| 17 | DF01 | 8CF | 4AWAN | AWAN | TAKPM13 | TAKPM13 | 20 | K45710B0C | ISO PARTITION MASK CD | PHOTO | Complete | 29 | 29 | 29 | 0 | 0 | 2025-12-10 09:53 | 2025-12-10 09:56 | 2025-12-10 09:56 | 2025-12-10 09:57 | 0:03:48 | 0:02:21 | 4TCDF703_20251210_094046_AWAN | AK_IPT_NEW | DF01_CP_ISO_PTN_MASK_CD_BM_Verity_NHW | |||||||
| 18 | DF01 | 8CC | 4AWAN | AWAN | TACNC96 | TACNC96 | 11 | T60911XCA | SN HM ETCHBACK CLN CD AWAN(TILT) | ETCH | Complete | 32 | 64 | 32 | 0 | 32 | 2025-12-10 09:51 | 2025-12-10 10:02 | 2025-12-10 10:02 | 2025-12-10 10:04 | 0:12:47 | 0:11:03 | EDS2301_INTP066294_AWAN | AC_SNHMEB_SN_TILT_TP | DF01_CP_SNHMEB_SN_TILT_OVL_CDI | |||||||
| 19 | DF01 | 8CF | 4AWAN | AWAN | TAKPM13 | TAKPM13 | 19 | K45710B0C | ISO PARTITION MASK CD | PHOTO | Complete | 29 | 29 | 29 | 0 | 0 | 2025-12-10 09:48 | 2025-12-10 09:51 | 2025-12-10 09:51 | 2025-12-10 09:52 | 0:03:53 | 0:02:28 | 4TCDF703_20251210_094046_AWAN | AK_IPT_NEW | DF01_CP_ISO_PTN_MASK_CD_BM_Verity_NHW | |||||||
| 20 | DF01 | 8CG | 4AWAN | AWAN | TAGAU37 | TAGAU37 | 12 | T62121B0A | SNC2(CELL) OPEN ETCH CLN CD | ETCH | Complete | 178 | 40 | 20 | 158 | 0 | 2025-12-10 09:48 | 2025-12-10 09:50 | 2025-12-10 09:51 | 2025-12-10 09:52 | 0:04:05 | 0:02:17 | ECDB003_INTP207386_AWAN | AG_SC2M0_SCO | DF01_CP_AG_SCO_DISTANCE_for_ImagePair_JSL_V3 | |||||||
| 21 | DF01 | 8CG | 4AWAN | AWAN | TSSHE29 | TSSHE29 | 10 | MA002075A | PMOS SIGE EPI CLN CD | IMP | Complete | 9 | 9 | 9 | 0 | 0 | 2025-12-10 09:47 | 2025-12-10 09:50 | 2025-12-10 09:50 | 2025-12-10 09:52 | 0:04:42 | 0:01:55 | ECDA703_INTP207200_AWAN | SS_HKMGEPI | SS_PMOS_HKMGEPI_CG6300_R0 | |||||||
| 22 | DF01 | Z8TEE | 4AWAN | AWAN | N4TMM00 | N4TMM00443 | 4 | N4NMMAC000600A | MI DF01A ETCH CG6300 RMA | MI | Complete | 324 | 54 | 54 | 270 | 0 | 2025-12-10 09:47 | 2025-12-10 09:51 | 2025-12-10 09:51 | 2025-12-10 09:53 | 0:05:13 | 0:03:05 | ECDD204_INTP215079_AWAN | CD_MONITORING_HR_500V_Y | DF01_BM_PREDICTION_WRM_500V_Y_BD_R2 | |||||||
| 23 | DF01 | Z8TEE | 4AWAN | AWAN | N4TMM00 | N4TMM00441 | 1 | N4NMMAC000600A | MI DF01A ETCH CG6300 RMA | MI | Complete | 432 | 72 | 72 | 360 | 0 | 2025-12-10 09:47 | 2025-12-10 09:52 | 2025-12-10 09:52 | 2025-12-10 09:54 | 0:06:27 | 0:04:06 | ECD5902_INTP282683_AWAN | CD_MONITORING_HR_800V_X | DF01_BM_PREDICTION_WRM_800V_X_BD_R2 | |||||||
| 24 | DF01 | Z8TEE | 4AWAN | AWAN | N4TMM00 | N4TMM00002 | 1 | N4NMMAC000600A | MI DF01A ETCH CG6300 RMA | MI | Complete | 108 | 18 | 18 | 90 | 0 | 2025-12-10 09:46 | 2025-12-10 09:49 | 2025-12-10 09:50 | 2025-12-10 09:50 | 0:04:06 | 0:02:19 | ECD0202_INTP148060_AWAN | CD_MONITORING_HR_800V_X | DF01_BM_PREDICTION_WRM_800V_X_BD_R2 | |||||||
| 25 | DF01 | Z8TEE | 4AWAN | AWAN | N4TMM00 | N4TMM00458 | 1 | N4NMMAC000600A | MI DF01A ETCH CG6300 RMA | MI | Complete | 108 | 18 | 18 | 90 | 0 | 2025-12-10 09:46 | 2025-12-10 09:49 | 2025-12-10 09:49 | 2025-12-10 09:50 | 0:04:05 | 0:02:35 | ECDD103_INTP149478_AWAN | CD_MONITORING_HR_800V_X | DF01_BM_PREDICTION_WRM_800V_X_BD_R2 |