Recipe History
Recipe History - Condition
| Fab | Lot Cd | Oper | DNUM | Image Filter | Measure Equip | Recipe | AWAN Recipe | Recipe Ver | Fomula Count | Create Date | Creator | Update Date | Updated by | Use Y/N | Last Y/N | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| 1 | DF01 | FDR | 0 | ALL | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R2 | 1 | 0 | 2018-11-19 11:59 | 홍석호 | 2018-11-19 11:59 | 홍석호 | TRUE | TRUE |
| 2 | DF01 | FBM | 0 | ALL | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R2 | 1 | 0 | 2017-10-24 16:54 | 홍석호 | 2017-10-24 16:58 | 홍석호 | TRUE | TRUE |
| 3 | DF01 | FBM | 0 | ALL | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R1 | 1 | 0 | 2018-01-23 15:39 | 홍석호 | 2018-03-06 14:32 | 홍석호 | TRUE | TRUE |
| 4 | DF01 | FBM | 0 | ALL | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R1 | 1 | 0 | 2017-12-14 10:36 | 홍석호 | 2017-12-14 10:36 | 홍석호 | TRUE | TRUE |
| 5 | DF01 | FCC | 0 | ALL | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R2 | 1 | 0 | 2018-11-28 15:27 | 홍석호 | 2018-11-28 15:28 | 홍석호 | TRUE | TRUE |
| 6 | DF01 | FCC | 0 | ALL | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R3 | 1 | 0 | 2018-04-25 9:04 | 홍석호 | 2018-04-25 9:04 | 홍석호 | TRUE | TRUE |
| 7 | DF01 | FCC | 0 | 1,2,11,12,13,14,15 | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R3 | 1 | 0 | 2018-04-25 9:04 | 홍석호 | 2018-04-25 9:04 | 홍석호 | TRUE | TRUE |
| 8 | DF01 | FCC | 0 | ALL | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R3 | 1 | 1 | 2016-11-10 17:17 | 홍석호 | 2016-11-16 16:02 | 홍석호 | TRUE | TRUE |
| 9 | DF01 | FCC | 0 | ALL | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R1 | 1 | 1 | 2016-11-10 17:17 | 홍석호 | 2016-11-16 16:02 | 홍석호 | TRUE | TRUE |
| 10 | DF01 | FCC | 0 | ALL | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R2 | 1 | 1 | 2016-11-10 17:17 | 홍석호 | 2016-11-16 16:02 | 홍석호 | TRUE | TRUE |
| 11 | DF01 | FCC | 0 | ALL | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R2 | 1 | 0 | 2018-06-07 13:51 | 홍석호 | 2018-06-07 13:51 | 홍석호 | TRUE | TRUE |
| 12 | DF01 | FCC | 0 | ALL | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R1 | 1 | 0 | 2018-06-07 13:51 | 홍석호 | 2018-06-07 13:51 | 홍석호 | TRUE | TRUE |
| 13 | DF01 | FCC | 0 | ALL | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R3 | 1 | 1 | 2016-11-10 17:18 | 홍석호 | 2016-11-16 16:02 | 홍석호 | TRUE | TRUE |
| 14 | DF01 | FCC | 0 | ALL | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R2 | 1 | 1 | 2016-11-10 17:18 | 홍석호 | 2016-11-16 16:02 | 홍석호 | TRUE | TRUE |
| 15 | DF01 | FDR | 0 | 4,13,22,31,40 | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R1 | 1 | 0 | 2018-12-03 14:35 | 홍석호 | 2018-12-03 14:35 | 홍석호 | TRUE | TRUE |
| 16 | DF01 | FDR | 0 | 5,14,23,32,41 | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R3 | 1 | 0 | 2018-12-03 14:38 | 홍석호 | 2018-12-03 14:40 | 홍석호 | TRUE | TRUE |
| 17 | DF01 | FDR | 0 | 6,15,24,33,42 | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R3 | 1 | 0 | 2018-12-03 14:38 | 홍석호 | 2018-12-03 14:40 | 홍석호 | TRUE | TRUE |
| 18 | DF01 | FDR | 0 | 1,10,19,28,37 | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R2 | 1 | 0 | 2018-12-03 14:39 | 홍석호 | 2018-12-03 14:40 | 홍석호 | TRUE | TRUE |
| 19 | DF01 | FDR | 0 | 2,11,20,29,38 | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R1 | 1 | 0 | 2018-12-03 14:39 | 홍석호 | 2018-12-03 14:40 | 홍석호 | TRUE | TRUE |
| 20 | DF01 | FDR | 0 | 3,12,21,30,39 | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R3 | 1 | 0 | 2018-12-03 14:39 | 홍석호 | 2018-12-03 14:40 | 홍석호 | TRUE | TRUE |
| 21 | DF01 | FDR | 0 | 7,16,25,34,43 | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R3 | 1 | 0 | 2018-12-03 14:39 | 홍석호 | 2018-12-03 14:40 | 홍석호 | TRUE | TRUE |
| 22 | DF01 | FDR | 0 | 8,17,26,35,44 | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R1 | 1 | 0 | 2018-12-03 14:40 | 홍석호 | 2018-12-03 14:40 | 홍석호 | TRUE | TRUE |
| 23 | DF01 | FDR | 0 | 9,18,27,36,45 | *.tif | CDSEM | CD_MONITOR_MASK | INSPECT_MONITOR_R1 | 1 | 0 | 2018-12-03 14:40 | 홍석호 | 2018-12-03 14:40 | 홍석호 | TRUE | TRUE |
| 24 | DF01 | FDR | 0 | 4 | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R1 | 1 | 0 | 2018-12-03 15:34 | 홍석호 | 2018-12-03 15:34 | 홍석호 | TRUE | TRUE |
| 25 | DF01 | FDR | 0 | 5 | *.tif | CDSEM | HV_MONITOR_MASK | INSPECT_MONITOR_R2 | 1 | 0 | 2018-12-03 15:34 | 홍석호 | 2018-12-03 15:34 | 홍석호 | TRUE | TRUE |