Recipe History

Recipe History - Condition

Fab Lot Cd Oper Main Oper Prv Oper Site
Seq		 DNUM Image Filter Measure Equip FINEBINNUMBER CD-SEM Recipe Recipe Recipe Ver Recipe Conf Desc Simulation Complete Y/N Fomula Count TO_FAB Dcol Use Y/N Create Date Creator Update Date Updated by Use Y/N Last Y/N
1 DF01 4DR * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER 7CCBL_BANK_HAIS DF01_47C_BMP_IPT_BLC_OVL_Y_HAIS 1 TRUE 0 TRUE 2018-11-19 11:59 홍석호 2018-11-19 11:59 홍석호 TRUE TRUE
2 DF01 4BM * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER BMNFC_OVERLAP_MAT_ALL_TP DF01_BMNFC_OVERLAP_CIRCLE_MAT_ALL_TP 1 TRUE 0 TRUE 2017-10-24 16:54 홍석호 2017-10-24 16:58 홍석호 TRUE TRUE
3 DF01 4BM * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER BMNFC_OVERLAP_TEST_TP DF01_BNNFC_OVERLAP_DCP_TP 1 TRUE 0 TRUE 2018-01-23 15:39 홍석호 2018-03-06 14:32 홍석호 TRUE TRUE
4 DF01 4BM * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER BMNFC_OVERLAP_WF_INTRA DF01_ALIUS_NFC_ETCH_AR 1 DF01_ALIUS_NFC_ETCH_AR TRUE 0 TRUE 2017-12-14 10:36 홍석호 2017-12-14 10:36 홍석호 TRUE TRUE
5 DF01 4CC * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER CNBMP_ALL_TP_AT_DF01_PICANS_SETUP DE_GBL_IPT_PICANS_DF01VE 1 DE_GBL_IPT_PICANS_DF01VE TRUE 0 TRUE 2018-11-28 15:27 홍석호 2018-11-28 15:28 홍석호 TRUE TRUE
6 DF01 4CC * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER CNBMP_BLC_INTRA_2F DF01_DENEB_GBL_AVERAGE_AR 1 TRUE 0 TRUE 2018-04-25 9:04 홍석호 2018-04-25 9:04 홍석호 TRUE TRUE
7 DF01 4CC * * 0 1,2,11,12,13,14,15 *.tif CDSEM FINEBINNUMBER CNBMP_BLC_INTRA_2F DF01_DENEB_GBL_AVERAGE_AR_PARAX 1 TRUE 0 TRUE 2018-04-25 9:04 홍석호 2018-04-25 9:04 홍석호 TRUE TRUE
8 DF01 4CC * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER CNBMP_CM_INTRA_TP_DF01_PICANS DE_GBL_IPT_PICANS_DF01VE 1 DE_GBL_IPT_PICANS_DF01VE TRUE 1 TRUE 2016-11-10 17:17 홍석호 2016-11-16 16:02 홍석호 TRUE TRUE
9 DF01 4CC * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER CNBMP_CM_TP_DF01_PICANS DE_GBL_IPT_PICANS_DF01VE 1 DE_GBL_IPT_PICANS_DF01VE TRUE 1 TRUE 2016-11-10 17:17 홍석호 2016-11-16 16:02 홍석호 TRUE TRUE
10 DF01 4CC * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER CPBMP_CM_INTRA_TP_DF01_PICANS DE_GBL_IPT_PICANS_DF01VE 1 DE_GBL_IPT_PICANS_DF01VE TRUE 1 TRUE 2016-11-10 17:17 홍석호 2016-11-16 16:02 홍석호 TRUE TRUE
11 DF01 4CC * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER CVBMP_BLC_INTRA_L DF01_DENEB_GBL_AVERAGE_AR 1 TRUE 0 TRUE 2018-06-07 13:51 홍석호 2018-06-07 13:51 홍석호 TRUE TRUE
12 DF01 4CC * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER CVBMP_BLC_INTRA_R DF01_DENEB_GBL_AVERAGE_AR 1 TRUE 0 TRUE 2018-06-07 13:51 홍석호 2018-06-07 13:51 홍석호 TRUE TRUE
13 DF01 4CC * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER CVBMP_CM_INTRA_TP_DF01_PICANS DE_GBL_IPT_PICANS_DF01VE 1 DE_GBL_IPT_PICANS_DF01VE TRUE 1 TRUE 2016-11-10 17:18 홍석호 2016-11-16 16:02 홍석호 TRUE TRUE
14 DF01 4CC * * 0 DEFAULT *.tif CDSEM FINEBINNUMBER CVBMP_CM_TP_INTRA_DF01_PICANS DE_GBL_IPT_PICANS_DF01VE 1 DE_GBL_IPT_PICANS_DF01VE TRUE 1 TRUE 2016-11-10 17:18 홍석호 2016-11-16 16:02 홍석호 TRUE TRUE
15 DF01 4DR * * 0 4,13,22,31,40 *.tif CDSEM FINEBINNUMBER D1BLC_MAT_EDGE_TP DF01_RDYA_PERI_RBC_CEN1_HAIS 1 TRUE 0 TRUE 2018-12-03 14:35 홍석호 2018-12-03 14:35 홍석호 TRUE TRUE
16 DF01 4DR * * 0 5,14,23,32,41 *.tif CDSEM FINEBINNUMBER D1BLC_MAT_EDGE_TP DF01_RDYA_PERI_RBC_CEN2_HAIS 1 TRUE 0 TRUE 2018-12-03 14:38 홍석호 2018-12-03 14:40 홍석호 TRUE TRUE
17 DF01 4DR * * 0 6,15,24,33,42 *.tif CDSEM FINEBINNUMBER D1BLC_MAT_EDGE_TP DF01_RDYA_PERI_RBC_CEN3_HAIS 1 TRUE 0 TRUE 2018-12-03 14:38 홍석호 2018-12-03 14:40 홍석호 TRUE TRUE
18 DF01 4DR * * 0 1,10,19,28,37 *.tif CDSEM FINEBINNUMBER D1BLC_MAT_EDGE_TP DF01_RDYA_PERI_RBC_LEFT1_HAIS 1 TRUE 0 TRUE 2018-12-03 14:39 홍석호 2018-12-03 14:40 홍석호 TRUE TRUE
19 DF01 4DR * * 0 2,11,20,29,38 *.tif CDSEM FINEBINNUMBER D1BLC_MAT_EDGE_TP DF01_RDYA_PERI_RBC_LEFT2_HAIS 1 TRUE 0 TRUE 2018-12-03 14:39 홍석호 2018-12-03 14:40 홍석호 TRUE TRUE
20 DF01 4DR * * 0 3,12,21,30,39 *.tif CDSEM FINEBINNUMBER D1BLC_MAT_EDGE_TP DF01_RDYA_PERI_RBC_LEFT3_HAIS 1 TRUE 0 TRUE 2018-12-03 14:39 홍석호 2018-12-03 14:40 홍석호 TRUE TRUE
21 DF01 4DR * * 0 7,16,25,34,43 *.tif CDSEM FINEBINNUMBER D1BLC_MAT_EDGE_TP DF01_RDYA_PERI_RBC_RIGHT1_HAIS 1 TRUE 0 TRUE 2018-12-03 14:39 홍석호 2018-12-03 14:40 홍석호 TRUE TRUE
22 DF01 4DR * * 0 8,17,26,35,44 *.tif CDSEM FINEBINNUMBER D1BLC_MAT_EDGE_TP DF01_RDYA_PERI_RBC_RIGHT2_HAIS 1 TRUE 0 TRUE 2018-12-03 14:40 홍석호 2018-12-03 14:40 홍석호 TRUE TRUE
23 DF01 4DR * * 0 9,18,27,36,45 *.tif CDSEM FINEBINNUMBER D1BLC_MAT_EDGE_TP DF01_RDYA_PERI_RBC_RIGHT3_HAIS 1 TRUE 0 TRUE 2018-12-03 14:40 홍석호 2018-12-03 14:40 홍석호 TRUE TRUE
24 DF01 4DR * * 0 4 *.tif CDSEM FINEBINNUMBER D1BLC_MAT_TB_TP DF01_RDRA_PERI_RBC_HBTM1 1 TRUE 0 TRUE 2018-12-03 15:34 홍석호 2018-12-03 15:34 홍석호 TRUE TRUE
25 DF01 4DR * * 0 5 *.tif CDSEM FINEBINNUMBER D1BLC_MAT_TB_TP DF01_RDRA_PERI_RBC_HBTM2 1 TRUE 0 TRUE 2018-12-03 15:34 홍석호 2018-12-03 15:34 홍석호 TRUE TRUE